Registration for the practicum
Registration in HIS is mandatory for participation in any practical training!
The HIS registration will be open till 31.05.2022.
Kickoff Meeting:
Date:
End of May (31.05.2023 - 7 am), zoom-link will be anounced in the moodle course
Theory:
The students will experience a complete hands-on fabrication process for different micromechanical structures. It is intentionally simplified with respect to all involved machines to allow an intuitive access to all sub-processes and all essential process parameters.
Experiments:
Cleaving, cleaning and preparation of samples.
Transfer of structures into a photoresist (spin coating, exposure, development).
Monitoring of structures with the microscope (quality control).
The lab is divided into:
1. Kickoff
During the kickoff meeting you will receive all information about the lab. If you do not agree with the time or content, you have the possibility to unsubscribe from the lab.
2. Colloquium preparation
This is a questionnaire that prepares you for the lab. Your answers will be included in the rating of your grade.
3. Lab appointment
Here you will learn how to use the microscope and you will transfere structures in a photoresist, vary process parameters and compare the results using microscope images.
It is expected that they have answered and understood the colloquium preparation.
4. Submission of the lab report (lithography)
Two weeks after the practical work in the lab, the lab report must be submitted here (PDF file).