The lecture will start on April 25, 2022 and is given on campus in WA. Due to neccessary repairs in -1606 we will have the first lecture in the CiP computer pool room (WA -1201) below cafeteria. From May 02 on, the lecture will take place in WA 2104. The key for this Moodle course will be distributed in the first lecture.
Lecture on technologies used for the fabrication of microelectronic and optoelectronic devices.
- Clean room and vacuum technology
- Materials for electronic and optoelectronic devices
- Deposition techniques
- Lithograpy methods
- Etching processes
- Additional processing techniques
- Fabrication processes of example devices