The lecture will start on April 17, 2023 and is given on campus in WA. The key for this Moodle course will be distributed in the first lecture.
Lecture on technologies used for the fabrication of microelectronic and optoelectronic devices.
- Clean room and vacuum technology
- Materials for electronic and optoelectronic devices
- Deposition techniques
- Lithograpy methods
- Etching processes
- Additional processing techniques
- Fabrication processes of example devices